Determination of P/Al ratio in phosphorus-doped aluminium oxide thin films by XRF, RBS and FTIR

M. Nieminen, L. Niinistö, R. Lappalainen

    Research output: Contribution to journalArticleScientificpeer-review

    27 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)13-22
    JournalMicrochimica Acta
    Volume119
    Publication statusPublished - 1995
    MoE publication typeA1 Journal article-refereed

    Keywords

    • aluminium oxide
    • ftir
    • phosphorus
    • rbs
    • thin film
    • xrf

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