Detection of low copper contamination in p-type silicon by microwave photoconductive decay measurements

Marko Yli-Koski, Martti Palokangas, Antti Haarahiltunen, Hele Väinölä, Jan Storgårds, Heikki Holmberg, Juha Sinkkonen

Research output: Working paperProfessional

Original languageEnglish
Pages1-7
Publication statusPublished - 2002
MoE publication typeD4 Published development or research report or study

Publication series

NameInternational Conference on Extended Defects in Semiconductors, Bologna, Italy, 5.-6.6.2002
PublisherIOP Publishing Limited

Keywords

  • copper, contamination, detection, silicon,
  • photoconductive decay

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