Detection of low copper contamination in p-type silicon by means of microwave photoconductive decay measurements

Marko Yli-Koski, Martti Palokangas, Antti Haarahiltunen, Hele Väinölä, Jan Storgårds, Heikki Holmberg, Juha Sinkkonen

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)13119-13125
JournalJournal of physics: Condensed matter
Volume14
Issue number48
Publication statusPublished - 2002
MoE publication typeA1 Journal article-refereed

Keywords

  • contamination
  • copper
  • detection
  • photoconductive decay
  • silicon

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