Detection of iron contamination in internally gettered p-type silicon wafers by lifetime measurements

Antti Haarahiltunen, Hele Väinölä, Marko Yli-Koski, Eero Saarnilehto, Juha Sinkkonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Title of host publicationElectrochemical Society Fall 2004 Meeting, Honolulu, USA 3-8.10.2004
EditorsThe Electrochemical Society
Pages135-145
Publication statusPublished - 2004
MoE publication typeA4 Article in a conference publication

Keywords

  • diffusion length
  • internal gettering
  • iron
  • lifetime
  • silicon

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