Abstract
Solid-Liquid Interdiffusion (SLID) bonding is a novel and attractive method for producing high strength, high melting point and microstructurally stabile interconnections for power electronic components, 3D packaging solutions and hermetic encapsulation for MEMS devices. However, there are quite a few different types of manufacturing related defects, which can have a significant effect on functionality and reliability performance of the SLID interconnections. With proper design for manufacturability i.e. by selecting the correct materials and by controlling their purity as well as by utilizing the optimal process parameters, the amount and effects of these defects can be minimized. In addition, in order to control the formation and evolution of the interconnection microstructure for high mechanical reliability the compatibility between the bonding materials and contact metallizations must be unambiguously defined and ensured.
| Original language | English |
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| Title of host publication | 20th European Microelectronics and Packaging Conference and Exhibition |
| Publisher | IEEE |
| Number of pages | 6 |
| ISBN (Electronic) | 978-0-9568-0862-2 |
| ISBN (Print) | 978-0-9568086-1-5 |
| Publication status | Published - 25 Jan 2016 |
| MoE publication type | A4 Conference publication |
| Event | European Microelectronics and Packaging Conference - Friedrichshafen, Germany Duration: 14 Sept 2015 → 16 Sept 2015 Conference number: 20 |
Conference
| Conference | European Microelectronics and Packaging Conference |
|---|---|
| Abbreviated title | EMPC |
| Country/Territory | Germany |
| City | Friedrichshafen |
| Period | 14/09/2015 → 16/09/2015 |