Design and fabrication of a tuning fork shaped voltage controlled resonator for low-voltage applications with additional tuning electrodes

Jakub Gronicz, Nikolai Chekurov, Marko Kosunen, Ilkka Tittonen

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)--
JournalJournal of Micromechanics and Microengineering
Issue number11
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

Equipment

OtaNano

Anna Rissanen (Manager)

Aalto University

Facility/equipment: Facility

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