Design and Fabrication of a tuning Fork Shaped Voltage Controlled Resonator with Additional Tuning Electrodes for Low-Voltage Applications

Nikolai Chekurov; Lasse Aaltonen; Jakub Gronicz; Marko Kosunen; Ilkka Tittonen

doi:10.1016/j.proeng.2010.09.250

Design and Fabrication of a tuning Fork Shaped Voltage Controlled Resonator with Additional Tuning Electrodes for Low-Voltage Applications

Nikolai Chekurov, Lasse Aaltonen, Jakub Gronicz, Marko Kosunen, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

5 Citations (Scopus)

150 Downloads (Pure)

Abstract

In this work a silicon voltage-controlled microelectromechanical tuning-fork resonator with electrostatic actuation and separate frequency tuning electrodes is presented. The released device is fabricated using a silicon-on-insulator (SOI) wafer by a 2-step process involving only Focused Ion Beam (FIB) masking and Cryogenic Deep Reactive Ion etching (DRIE). This process is ideal for rapid prototyping, as the time to turn a design into the final device is only a few hours. The design of the resonator is optimized to accommodate the restrictions of the fabrication process, to maximize the frequency tunability and to minimize the biasing voltage. Separating tuning and driving electrodes enables the resonance frequency adjustment by over 10000 ppm (fcentral > 1.5 MHz, quality factor Q = 2000) with a tuning voltage of 12 volts.

Original language	English
Title of host publication	Proc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria
Pages	882–885
DOIs	https://doi.org/10.1016/j.proeng.2010.09.250
Publication status	Published - 2010
MoE publication type	A4 Conference publication
Event	European Conference on Solid-State Transducers - Linz, Austria Duration: 5 Sept 2010 → 8 Sept 2010 Conference number: 24

Publication series

Name	Procedia Engineering
Publisher	Elsevier
Volume	5
ISSN (Print)	1877-7058

Conference

Conference	European Conference on Solid-State Transducers
Abbreviated title	Eurosensors
Country/Territory	Austria
City	Linz
Period	05/09/2010 → 08/09/2010

Keywords

MEMS
VCO
RF
FIB
DRIE

Access to Document

10.1016/j.proeng.2010.09.250

1-s2.0-S1877705810007976-mainFinal published version, 410 KBLicence: CC BY-NC-ND

Cite this

Chekurov, N., Aaltonen, L., Gronicz, J., Kosunen, M., & Tittonen, I. (2010). Design and Fabrication of a tuning Fork Shaped Voltage Controlled Resonator with Additional Tuning Electrodes for Low-Voltage Applications. In Proc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria (pp. 882–885). (Procedia Engineering; Vol. 5). https://doi.org/10.1016/j.proeng.2010.09.250

@inproceedings{2da56aba8250499d94cc94a88eae0fb0,

title = "Design and Fabrication of a tuning Fork Shaped Voltage Controlled Resonator with Additional Tuning Electrodes for Low-Voltage Applications",

abstract = "In this work a silicon voltage-controlled microelectromechanical tuning-fork resonator with electrostatic actuation and separate frequency tuning electrodes is presented. The released device is fabricated using a silicon-on-insulator (SOI) wafer by a 2-step process involving only Focused Ion Beam (FIB) masking and Cryogenic Deep Reactive Ion etching (DRIE). This process is ideal for rapid prototyping, as the time to turn a design into the final device is only a few hours. The design of the resonator is optimized to accommodate the restrictions of the fabrication process, to maximize the frequency tunability and to minimize the biasing voltage. Separating tuning and driving electrodes enables the resonance frequency adjustment by over 10000 ppm (fcentral > 1.5 MHz, quality factor Q = 2000) with a tuning voltage of 12 volts.",

keywords = "MEMS, VCO, RF, FIB, DRIE",

author = "Nikolai Chekurov and Lasse Aaltonen and Jakub Gronicz and Marko Kosunen and Ilkka Tittonen",

year = "2010",

doi = "10.1016/j.proeng.2010.09.250",

language = "English",

series = "Procedia Engineering",

publisher = "Elsevier",

pages = "882–885",

booktitle = "Proc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria",

note = "European Conference on Solid-State Transducers, Eurosensors ; Conference date: 05-09-2010 Through 08-09-2010",

}

Chekurov, N, Aaltonen, L, Gronicz, J , Kosunen, M & Tittonen, I 2010, Design and Fabrication of a tuning Fork Shaped Voltage Controlled Resonator with Additional Tuning Electrodes for Low-Voltage Applications. in Proc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria. Procedia Engineering, vol. 5, pp. 882–885, European Conference on Solid-State Transducers, Linz, Austria, 05/09/2010. https://doi.org/10.1016/j.proeng.2010.09.250

Design and Fabrication of a tuning Fork Shaped Voltage Controlled Resonator with Additional Tuning Electrodes for Low-Voltage Applications. / Chekurov, Nikolai; Aaltonen, Lasse; Gronicz, Jakub et al.
Proc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria. 2010. p. 882–885 (Procedia Engineering; Vol. 5).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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T1 - Design and Fabrication of a tuning Fork Shaped Voltage Controlled Resonator with Additional Tuning Electrodes for Low-Voltage Applications

AU - Chekurov, Nikolai

AU - Aaltonen, Lasse

AU - Gronicz, Jakub

AU - Kosunen, Marko

AU - Tittonen, Ilkka

N1 - Conference code: 24

PY - 2010

Y1 - 2010

N2 - In this work a silicon voltage-controlled microelectromechanical tuning-fork resonator with electrostatic actuation and separate frequency tuning electrodes is presented. The released device is fabricated using a silicon-on-insulator (SOI) wafer by a 2-step process involving only Focused Ion Beam (FIB) masking and Cryogenic Deep Reactive Ion etching (DRIE). This process is ideal for rapid prototyping, as the time to turn a design into the final device is only a few hours. The design of the resonator is optimized to accommodate the restrictions of the fabrication process, to maximize the frequency tunability and to minimize the biasing voltage. Separating tuning and driving electrodes enables the resonance frequency adjustment by over 10000 ppm (fcentral > 1.5 MHz, quality factor Q = 2000) with a tuning voltage of 12 volts.

AB - In this work a silicon voltage-controlled microelectromechanical tuning-fork resonator with electrostatic actuation and separate frequency tuning electrodes is presented. The released device is fabricated using a silicon-on-insulator (SOI) wafer by a 2-step process involving only Focused Ion Beam (FIB) masking and Cryogenic Deep Reactive Ion etching (DRIE). This process is ideal for rapid prototyping, as the time to turn a design into the final device is only a few hours. The design of the resonator is optimized to accommodate the restrictions of the fabrication process, to maximize the frequency tunability and to minimize the biasing voltage. Separating tuning and driving electrodes enables the resonance frequency adjustment by over 10000 ppm (fcentral > 1.5 MHz, quality factor Q = 2000) with a tuning voltage of 12 volts.

KW - MEMS

KW - VCO

KW - RF

KW - FIB

KW - DRIE

U2 - 10.1016/j.proeng.2010.09.250

DO - 10.1016/j.proeng.2010.09.250

M3 - Conference article in proceedings

T3 - Procedia Engineering

SP - 882

EP - 885

BT - Proc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria

T2 - European Conference on Solid-State Transducers

Y2 - 5 September 2010 through 8 September 2010

ER -

Design and Fabrication of a tuning Fork Shaped Voltage Controlled Resonator with Additional Tuning Electrodes for Low-Voltage Applications

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Keywords

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