Design and Fabrication of a tuning Fork Shaped Voltage Controlled Resonator with Additional Tuning Electrodes for Low-Voltage Applications

Nikolai Chekurov, Lasse Aaltonen, Jakub Gronicz, Marko Kosunen, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

5 Citations (Scopus)
153 Downloads (Pure)

Abstract

In this work a silicon voltage-controlled microelectromechanical tuning-fork resonator with electrostatic actuation and separate frequency tuning electrodes is presented. The released device is fabricated using a silicon-on-insulator (SOI) wafer by a 2-step process involving only Focused Ion Beam (FIB) masking and Cryogenic Deep Reactive Ion etching (DRIE). This process is ideal for rapid prototyping, as the time to turn a design into the final device is only a few hours. The design of the resonator is optimized to accommodate the restrictions of the fabrication process, to maximize the frequency tunability and to minimize the biasing voltage. Separating tuning and driving electrodes enables the resonance frequency adjustment by over 10000 ppm (fcentral > 1.5 MHz, quality factor Q = 2000) with a tuning voltage of 12 volts.
Original languageEnglish
Title of host publicationProc. Eurosensors XXIV, September 5-8, 2010, Linz, Austria
Pages882–885
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Conference publication
EventEuropean Conference on Solid-State Transducers - Linz, Austria
Duration: 5 Sept 20108 Sept 2010
Conference number: 24

Publication series

NameProcedia Engineering
PublisherElsevier
Volume5
ISSN (Print)1877-7058

Conference

ConferenceEuropean Conference on Solid-State Transducers
Abbreviated titleEurosensors
Country/TerritoryAustria
CityLinz
Period05/09/201008/09/2010

Keywords

  • MEMS
  • VCO
  • RF
  • FIB
  • DRIE

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