Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer

Mikko I. Laitinen*, T. Sajavaara, M. Rossi, J. Julin, R. L. Puurunen, T. Suni, T. Ishida, H. Fujita, K. Arstila, B. Brijs, H. J. Whitlow

*Corresponding author for this work

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