Depth Profiling and Quantification in Thin Film Heterostructure Materials by Secondary Mass Spectrometry

E.O. Ristolainen, P. Holloway

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication4th European Vacuum Conference, 13-17 June, 1994, Uppsala
    Publication statusPublished - 1994
    MoE publication typeA4 Article in a conference publication

    Keywords

    • heterostructure
    • SIMS
    • thin film

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