Deposition of yttria-stabilized zirconia thin films by atomic layer epitaxy from beta diketonate and organometallic precursors

Matti Putkonen, Timo Sajavaara, Jaakko Niinistö, Leena-Sisko Johansson, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    45 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)442-448
    JournalJournal of Materials Chemistry
    Volume12
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • thin films
    • YSZ
    • zirconia

    Cite this