Deposition of thin films of lanthanum sulfide

K. Kukli, H. Heikkinen, E. Nykänen, L. Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe 4th Baltic Symposium on Atomic Layer Epitaxy, Tartu, Estonia, October 10-11, 1997
    EditorsA. Rosental
    Place of PublicationTartto
    Pages15
    Publication statusPublished - 1997
    MoE publication typeA4 Article in a conference publication

    Keywords

    • atomic layer epitaxy
    • lanthanum sulfide
    • thin film
    • XPS
    • XRD

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