Deposition of thin films of lanthanum sesquisulfide by atomic layer epitaxy

K. Kukli, E. Nykänen, L. Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationInternational Conference on f Elements, Paris, France, September 14-18, 1997
    EditorsP. Porcher, J. Hölsä
    Pages67
    Publication statusPublished - 1997
    MoE publication typeA4 Article in a conference publication

    Keywords

    • atomic layer epitaxy
    • lanthanum sesquisulfide
    • thin film

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