Deposition of Lanthanum Sulfide Thin Films by Atomic Layer Epitaxy

K. Kukli, H. Heikkinen, E. Nykänen, L. Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    25 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)10-14
    JournalJournal of Alloys and Compounds
    Volume275-277
    Publication statusPublished - 1998
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ale
    • atomic layer epitaxy
    • lanthanum sulfide
    • thin films

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