Deposition of cerium dioxide buffer layers by atomic layer epitaxy

J. Päiväsaari, M. Putkonen, L. Niinistö

    Research output: Working paperProfessional

    Original languageEnglish
    Pagesp. FP7
    Publication statusPublished - 2000
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameFourth International Conference on f-elements, Madrid, Spain, September 17-21, 2000

    Keywords

    • atomic layer epitaxy
    • beta-diketonate
    • buffer layer
    • thin film

    Cite this

    Päiväsaari, J., Putkonen, M., & Niinistö, L. (2000). Deposition of cerium dioxide buffer layers by atomic layer epitaxy. (pp. p. FP7). (Fourth International Conference on f-elements, Madrid, Spain, September 17-21, 2000).