Deposition of bismuth silicate thin films for buffer layers by atomic layer deposition

Jenni Harjuoja, Matti Putkonen, Lauri Niinistö

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationHelsinki
    Pages90
    Publication statusPublished - 2004
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameAVS Topical Conference on Atomic Layer Deposition, Helsinki, August 16-18, 2004
    PublisherAmerican Vacuum Society

    Cite this

    Harjuoja, J., Putkonen, M., & Niinistö, L. (2004). Deposition of bismuth silicate thin films for buffer layers by atomic layer deposition. (pp. 90). (AVS Topical Conference on Atomic Layer Deposition, Helsinki, August 16-18, 2004).