Deposition of Binary and Ternary Oxide Thin Films of Trivalent Metals by Atomic Layer Epitaxy

Minna Nieminen

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationEspoo
    Publication statusPublished - 2001
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameHelsinki University of Technology, Inorganic Chemistry Publication Series
    PublisherHelsinki University of Technology, Laboratory of Inorganic and Analytical Chemistry


    • atomic layer epitaxy
    • binary oxide
    • ternary oxide
    • thin film

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