Density measurements of diamond-like coatings using a low energy accelerator

A. Anttila*, J. Koskinen, M. Bister, J. Hirvonen

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)


With the aid of nuclear physical methods based on the use of a low energy accelerator it is shown that the density of even a small, uneven and rough diamond-like coating prepared by mass-separated ion beam deposition can be determined reliably. The density of the coating corresponds to that of diamond. Outlines of the used methods, i.e. Rutherford backscattering and/or nuclear resonance shift combined with the use of a profilometer and Doppler shift attenuation, are presented.

Original languageEnglish
Pages (from-to)129-134
Number of pages6
JournalThin Solid Films
Issue number1
Publication statusPublished - 1 Feb 1986
MoE publication typeA1 Journal article-refereed


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