Abstract
With the aid of nuclear physical methods based on the use of a low energy accelerator it is shown that the density of even a small, uneven and rough diamond-like coating prepared by mass-separated ion beam deposition can be determined reliably. The density of the coating corresponds to that of diamond. Outlines of the used methods, i.e. Rutherford backscattering and/or nuclear resonance shift combined with the use of a profilometer and Doppler shift attenuation, are presented.
Original language | English |
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Pages (from-to) | 129-134 |
Number of pages | 6 |
Journal | Thin Solid Films |
Volume | 136 |
Issue number | 1 |
DOIs | |
Publication status | Published - 1 Feb 1986 |
MoE publication type | A1 Journal article-refereed |