Density measurements of diamond-like coatings using a low energy accelerator

A. Anttila; J. Koskinen; M. Bister; J. Hirvonen

doi:10.1016/0040-6090(86)90115-X

Density measurements of diamond-like coatings using a low energy accelerator

A. Anttila^*, J. Koskinen, M. Bister, J. Hirvonen

^*Corresponding author for this work

Not published at Aalto University

Research output: Contribution to journal › Article › Scientific › peer-review

21 Citations (Scopus)

Abstract

With the aid of nuclear physical methods based on the use of a low energy accelerator it is shown that the density of even a small, uneven and rough diamond-like coating prepared by mass-separated ion beam deposition can be determined reliably. The density of the coating corresponds to that of diamond. Outlines of the used methods, i.e. Rutherford backscattering and/or nuclear resonance shift combined with the use of a profilometer and Doppler shift attenuation, are presented.

Original language	English
Pages (from-to)	129-134
Number of pages	6
Journal	Thin Solid Films
Volume	136
Issue number	1
DOIs	https://doi.org/10.1016/0040-6090(86)90115-X
Publication status	Published - 1 Feb 1986
MoE publication type	A1 Journal article-refereed

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@article{932ed140cd3748ae8c1e0bec3f06fd60,

title = "Density measurements of diamond-like coatings using a low energy accelerator",

abstract = "With the aid of nuclear physical methods based on the use of a low energy accelerator it is shown that the density of even a small, uneven and rough diamond-like coating prepared by mass-separated ion beam deposition can be determined reliably. The density of the coating corresponds to that of diamond. Outlines of the used methods, i.e. Rutherford backscattering and/or nuclear resonance shift combined with the use of a profilometer and Doppler shift attenuation, are presented.",

author = "A. Anttila and J. Koskinen and M. Bister and J. Hirvonen",

year = "1986",

month = feb,

day = "1",

doi = "10.1016/0040-6090(86)90115-X",

language = "English",

volume = "136",

pages = "129--134",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier Science",

number = "1",

}

TY - JOUR

T1 - Density measurements of diamond-like coatings using a low energy accelerator

AU - Anttila, A.

AU - Koskinen, J.

AU - Bister, M.

AU - Hirvonen, J.

PY - 1986/2/1

Y1 - 1986/2/1

N2 - With the aid of nuclear physical methods based on the use of a low energy accelerator it is shown that the density of even a small, uneven and rough diamond-like coating prepared by mass-separated ion beam deposition can be determined reliably. The density of the coating corresponds to that of diamond. Outlines of the used methods, i.e. Rutherford backscattering and/or nuclear resonance shift combined with the use of a profilometer and Doppler shift attenuation, are presented.

AB - With the aid of nuclear physical methods based on the use of a low energy accelerator it is shown that the density of even a small, uneven and rough diamond-like coating prepared by mass-separated ion beam deposition can be determined reliably. The density of the coating corresponds to that of diamond. Outlines of the used methods, i.e. Rutherford backscattering and/or nuclear resonance shift combined with the use of a profilometer and Doppler shift attenuation, are presented.

UR - http://www.scopus.com/inward/record.url?scp=0022660626&partnerID=8YFLogxK

U2 - 10.1016/0040-6090(86)90115-X

DO - 10.1016/0040-6090(86)90115-X

M3 - Article

AN - SCOPUS:0022660626

VL - 136

SP - 129

EP - 134

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 1

ER -

Density measurements of diamond-like coatings using a low energy accelerator

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