Density measurements of diamond-like coatings using a low energy accelerator

A. Anttila; J. Koskinen; M. Bister; J. Hirvonen

doi:10.1016/0040-6090(86)90115-X

Density measurements of diamond-like coatings using a low energy accelerator

A. Anttila^*, J. Koskinen, M. Bister, J. Hirvonen

^*Corresponding author for this work

Not published at Aalto University

Research output: Contribution to journal › Article › Scientific › peer-review

21 Citations (Scopus)

Abstract

With the aid of nuclear physical methods based on the use of a low energy accelerator it is shown that the density of even a small, uneven and rough diamond-like coating prepared by mass-separated ion beam deposition can be determined reliably. The density of the coating corresponds to that of diamond. Outlines of the used methods, i.e. Rutherford backscattering and/or nuclear resonance shift combined with the use of a profilometer and Doppler shift attenuation, are presented.

Original language	English
Pages (from-to)	129-134
Number of pages	6
Journal	Thin Solid Films
Volume	136
Issue number	1
DOIs	https://doi.org/10.1016/0040-6090(86)90115-X
Publication status	Published - 1 Feb 1986
MoE publication type	A1 Journal article-refereed

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AU - Hirvonen, J.

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AB - With the aid of nuclear physical methods based on the use of a low energy accelerator it is shown that the density of even a small, uneven and rough diamond-like coating prepared by mass-separated ion beam deposition can be determined reliably. The density of the coating corresponds to that of diamond. Outlines of the used methods, i.e. Rutherford backscattering and/or nuclear resonance shift combined with the use of a profilometer and Doppler shift attenuation, are presented.

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Density measurements of diamond-like coatings using a low energy accelerator

Abstract

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