@article{69ff86eab276435c9106d51a0c68c145,
title = "Defect characterization of heavily As and P doped Si epilayers",
keywords = "group V dopants, heavy doping, positrons, Si, group V dopants, heavy doping, positrons, Si, group V dopants, heavy doping, positrons, Si",
author = "Simo Kilpel{\"a}inen and Katja Kuitunen and Jonatan Slotte and Filip Tuomisto and Ga{\"e}l Borot and Laurent Rubaldo and L. Cl{\'e}ment and Roland Pantel and Didier Dutartre",
year = "2009",
month = nov,
doi = "10.1002/pssc.200982102",
language = "English",
volume = "6",
pages = "2537--2539",
journal = "PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS",
issn = "1862-6351",
publisher = "Wiley",
number = "11",
}