Defect characterization of heavily As and P doped Si epilayers

Simo Kilpeläinen, Katja Kuitunen, Jonatan Slotte, Filip Tuomisto, Gaël Borot, Laurent Rubaldo, L. Clément, Roland Pantel, Didier Dutartre

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)2537-2539
Number of pages3
JournalPHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS
Volume6
Issue number11
DOIs
Publication statusPublished - Nov 2009
MoE publication typeA1 Journal article-refereed

Keywords

  • group V dopants
  • heavy doping
  • positrons
  • Si

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