Deep Silicon Structures by Electrochemical Etching

Kestutis Grigoras, A.J. Niskanen, Sami Franssila

Research output: Working paperProfessional

Original languageEnglish
Place of PublicationUppsala, Sweden
Publication statusPublished - 2000
MoE publication typeD4 Published development or research report or study

Publication series

NameMME 2000 Micromechanics Europe, Uppsala, Sweden, 1.-3.10.2000
PublisherUppsala University

Keywords

  • electrochemical etching
  • macroporous silicon
  • micromachining

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