@techreport{32266e32a3904f6da1ca5a1bcd120952,
title = "Deep Silicon Structures by Electrochemical Etching",
keywords = "electrochemical etching, macroporous silicon, micromachining, electrochemical etching, macroporous silicon, micromachining, electrochemical etching, macroporous silicon, micromachining",
author = "Kestutis Grigoras and A.J. Niskanen and Sami Franssila",
year = "2000",
language = "English",
series = "MME 2000 Micromechanics Europe, Uppsala, Sweden, 1.-3.10.2000",
publisher = "Uppsala University",
type = "WorkingPaper",
institution = "Uppsala University",
}