Deep Reactive Ion Etching

Franz Lärmer, Sami Franssila, Lauri Sainiemi, Kai Kolari

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

20 Citations (Scopus)
Original languageEnglish
Title of host publicationHandbook of silicon based MEMS materials and technologies, 2nd edition
EditorsSami Franssila, Markku Tilli, Veikko Lindroos, Teruaki Motooka, Veli-Matti Airaksinen, Mervi Paulasto-Krockel
Place of PublicationLontoo
PublisherElsevier
Pages444-469
ISBN (Electronic)978-0-08-094772-3
ISBN (Print)978-0-323-29965-7
DOIs
Publication statusPublished - 2015
MoE publication typeA3 Part of a book or another research book

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