Deep plasme etching of glass for fluidic devices

K. Kolari, V. Saarela, S. Franssila

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2007
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameProc. Micromechanics Europe, Guimares, Portugal 2007

    Keywords

    • DRIE
    • etching
    • glass
    • microfluidics

    Cite this