Data of ALD Al2O3 rear surface passivation, Al2O3 PERC cell performance, and cell efficiency loss mechanisms of Al2O3 PERC cell

Haibing Huang; Jun Lv; Yameng Bao; Rongwei Xuan; Shenghua Sun; Sami Sneck; Shuo Li; Chiara Modanese; Hele Savin; Aihua Wang; Jianhua Zhao

doi:10.1016/j.dib.2016.12.030

Data of ALD Al₂O₃ rear surface passivation, Al₂O₃ PERC cell performance, and cell efficiency loss mechanisms of Al₂O₃ PERC cell

Haibing Huang^*
, Jun Lv
, Yameng Bao
, Rongwei Xuan
, Shenghua Sun
, Sami Sneck
, Shuo Li
, Chiara Modanese
, Hele Savin
, Aihua Wang
, Jianhua Zhao

^*Corresponding author for this work

China Sunergy
Beneq Oy

Research output: Contribution to journal › Article › Scientific › peer-review

11 Citations (Scopus)

505 Downloads (Pure)

Abstract

This data article is related to the recently published article ‘20.8% industrial PERC solar cell: ALD Al₂O₃ rear surface passivation, efficiency loss mechanisms analysis and roadmap to 24%’ (Huang et al., 2017) [1]. This paper is about passivated emitter and rear cell (PERC) structures and it describes the quality of the Al₂O₃ rear-surface passivation layer deposited by atomic layer deposition (ALD), in relation to the processing parameters (e.g. pre-clean treatment, deposition temperature, growth per cycle, and film thickness) and to the cell efficiency loss mechanisms. This dataset is made public in order to contribute to the limited available public data on industrial PERC cells, to be used by other researchers.

Original language	English
Pages (from-to)	19-26
Number of pages	8
Journal	Data in Brief
Volume	11
DOIs	https://doi.org/10.1016/j.dib.2016.12.030
Publication status	Published - 1 Apr 2017
MoE publication type	A1 Journal article-refereed

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

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10.1016/j.dib.2016.12.030

1-s2.0-S2352340916307910-mainFinal published version, 920 KBLicence: CC BY-NC-ND

Cite this

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title = "Data of ALD Al2O3 rear surface passivation, Al2O3 PERC cell performance, and cell efficiency loss mechanisms of Al2O3 PERC cell",

abstract = "This data article is related to the recently published article {\textquoteleft}20.8\% industrial PERC solar cell: ALD Al2O3 rear surface passivation, efficiency loss mechanisms analysis and roadmap to 24\%{\textquoteright} (Huang et al., 2017) [1]. This paper is about passivated emitter and rear cell (PERC) structures and it describes the quality of the Al2O3 rear-surface passivation layer deposited by atomic layer deposition (ALD), in relation to the processing parameters (e.g. pre-clean treatment, deposition temperature, growth per cycle, and film thickness) and to the cell efficiency loss mechanisms. This dataset is made public in order to contribute to the limited available public data on industrial PERC cells, to be used by other researchers.",

author = "Haibing Huang and Jun Lv and Yameng Bao and Rongwei Xuan and Shenghua Sun and Sami Sneck and Shuo Li and Chiara Modanese and Hele Savin and Aihua Wang and Jianhua Zhao",

year = "2017",

month = apr,

day = "1",

doi = "10.1016/j.dib.2016.12.030",

language = "English",

volume = "11",

pages = "19--26",

journal = "Data in Brief",

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TY - JOUR

T1 - Data of ALD Al2O3 rear surface passivation, Al2O3 PERC cell performance, and cell efficiency loss mechanisms of Al2O3 PERC cell

AU - Huang, Haibing

AU - Lv, Jun

AU - Bao, Yameng

AU - Xuan, Rongwei

AU - Sun, Shenghua

AU - Sneck, Sami

AU - Li, Shuo

AU - Modanese, Chiara

AU - Savin, Hele

AU - Wang, Aihua

AU - Zhao, Jianhua

PY - 2017/4/1

Y1 - 2017/4/1

N2 - This data article is related to the recently published article ‘20.8% industrial PERC solar cell: ALD Al2O3 rear surface passivation, efficiency loss mechanisms analysis and roadmap to 24%’ (Huang et al., 2017) [1]. This paper is about passivated emitter and rear cell (PERC) structures and it describes the quality of the Al2O3 rear-surface passivation layer deposited by atomic layer deposition (ALD), in relation to the processing parameters (e.g. pre-clean treatment, deposition temperature, growth per cycle, and film thickness) and to the cell efficiency loss mechanisms. This dataset is made public in order to contribute to the limited available public data on industrial PERC cells, to be used by other researchers.

AB - This data article is related to the recently published article ‘20.8% industrial PERC solar cell: ALD Al2O3 rear surface passivation, efficiency loss mechanisms analysis and roadmap to 24%’ (Huang et al., 2017) [1]. This paper is about passivated emitter and rear cell (PERC) structures and it describes the quality of the Al2O3 rear-surface passivation layer deposited by atomic layer deposition (ALD), in relation to the processing parameters (e.g. pre-clean treatment, deposition temperature, growth per cycle, and film thickness) and to the cell efficiency loss mechanisms. This dataset is made public in order to contribute to the limited available public data on industrial PERC cells, to be used by other researchers.

UR - https://www.scopus.com/pages/publications/85009727873

U2 - 10.1016/j.dib.2016.12.030

DO - 10.1016/j.dib.2016.12.030

M3 - Article

AN - SCOPUS:85009727873

SN - 2352-3409

VL - 11

SP - 19

EP - 26

JO - Data in Brief

JF - Data in Brief

ER -

Data of ALD Al₂O₃ rear surface passivation, Al₂O₃ PERC cell performance, and cell efficiency loss mechanisms of Al₂O₃ PERC cell

Abstract

UN SDGs

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20.8% industrial PERC solar cell: ALD Al₂O₃ rear surface passivation, efficiency loss mechanisms analysis and roadmap to 24%

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