Damping of a vibrating beam

J. Hietanen, J. Bomer, J. Jonsmann, W. Olthuis, P. Bergveld, K. Kaski

    Research output: Contribution to journalArticleScientificpeer-review

    4 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)39-44
    JournalSensors and Actuators A: Physical
    Issue number86
    DOIs
    Publication statusPublished - 2000
    MoE publication typeA1 Journal article-refereed

    Keywords

    • acoustics
    • microelectromechanical systems

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