Damage production in hydrogen‐implanted silicon

J. Lahtinen*, A. Vehanen, E. Punkka, Pekka Hautojärvi, J. Keinonen, Mikko Hautala, E. Rauhala, V. Karttunen, A. Kuronen, J. Räisänen

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)325-326
Number of pages2
JournalSurface and Interface Analysis
Issue number5
Publication statusPublished - 1988
MoE publication typeA1 Journal article-refereed

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