Original language | English |
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Pages (from-to) | 325-326 |
Number of pages | 2 |
Journal | Surface and Interface Analysis |
Volume | 12 |
Issue number | 5 |
DOIs | |
Publication status | Published - 1988 |
MoE publication type | A1 Journal article-refereed |
Damage production in hydrogen‐implanted silicon
J. Lahtinen*, A. Vehanen, E. Punkka, Pekka Hautojärvi, J. Keinonen, Mikko Hautala, E. Rauhala, V. Karttunen, A. Kuronen, J. Räisänen
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review