Cyclopentadienyl-type precursors for atomic layer deposition of thin films

Matti Putkonen, Lauri Niinistö

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	ALD2004, August16-18, 2004, Helsinki
Place of Publication	Helsinki
Publisher	University of Helsinki
Publication status	Published - 2004
MoE publication type	A4 Article in a conference publication

Keywords

@inproceedings{dffa7976381c4ca38d999442c315fb3b,

title = "Cyclopentadienyl-type precursors for atomic layer deposition of thin films",

keywords = "ALD, cyclopentadiene precursors, thin films, ALD, cyclopentadiene precursors, thin films, ALD, cyclopentadiene precursors, thin films",

author = "Matti Putkonen and Lauri Niinist{\"o}",

year = "2004",

language = "English",

booktitle = "ALD2004, August16-18, 2004, Helsinki",

publisher = "University of Helsinki",

address = "Finland",

}

TY - GEN

T1 - Cyclopentadienyl-type precursors for atomic layer deposition of thin films

AU - Putkonen, Matti

AU - Niinistö, Lauri

PY - 2004

Y1 - 2004

KW - ALD

KW - cyclopentadiene precursors

KW - thin films

KW - ALD

KW - cyclopentadiene precursors

KW - thin films

KW - ALD

KW - cyclopentadiene precursors

KW - thin films

M3 - Conference contribution

BT - ALD2004, August16-18, 2004, Helsinki

PB - University of Helsinki

CY - Helsinki

ER -