Cyclopentadienyl-type precursors for atomic layer deposition of thin films

Matti Putkonen, Lauri Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationALD2004, August16-18, 2004, Helsinki
    Place of PublicationHelsinki
    PublisherUniversity of Helsinki
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication

    Keywords

    • ALD
    • cyclopentadiene precursors
    • thin films

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