Cycloheptatrienyl-cyclopentadienyl heteroleptic precursors for atomic layer deposition of group 4 oxide thin films

Jaakko Niinistö*, Timo Hatanpää, Maarit Kariniemi, Miia Mäntymäki, Leila Costelle, Kenichiro Mizohata, Kaupo Kukli, Mikko Ritala, Markku Leskelä

*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

28 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Cycloheptatrienyl-cyclopentadienyl heteroleptic precursors for atomic layer deposition of group 4 oxide thin films'. Together they form a unique fingerprint.

Material Science