Crystallization of bismuth titanate and bismuth silicate grown as thin films by atomic layer deposition

Jenni Harjuoja, Samuli Väyrynen, Matti Putkonen, Lauri Niinistö, Eero Rauhala

    Research output: Contribution to journalArticleScientificpeer-review

    22 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)376-383
    JournalJournal of Crystal Growth
    Volume286
    Issue number2
    Publication statusPublished - 2006
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Bismuth oxides, Atomic Layer Deposition, ALD, Crystal structure

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