Cross-section X-scanning force microscopy analysis of different hard coatings and thin films

Kaj Pischow, M. Adamik, P.B. Barna, A.S. Korhonen

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)1716-
    JournalJournal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures
    Volume12
    Issue number3
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Keywords

    • hard coatings
    • sfm
    • thin films

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