Criteria for different growth modes of thin films

J. A. Nieminen; Kimmo Kaski

doi:10.1016/S0039-6028(87)80605-2

Criteria for different growth modes of thin films

J. A. Nieminen, Kimmo Kaski

Not published at Aalto University

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

The possibilities to separate different growth modes of thin filsm are discussed using results of Monte Carlo simulation. The growth mode can be recognized from the time evolution of the coverage, the mean square deviation of the coverage, the estimated number of clusters on the substrate and snapshots at different stages of growth. In addition to defining and verifying the criteria for layer-by-layer and island modes, we can identify the intermediate simultaneous multilayer growth.

Original language	English
Pages (from-to)	L489-L496
Journal	Surface Science
Volume	185
Issue number	1-2
DOIs	https://doi.org/10.1016/S0039-6028(87)80605-2
Publication status	Published - 1987
MoE publication type	A1 Journal article-refereed

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10.1016/S0039-6028(87)80605-2

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@article{30b542062c9a4144a0fcbff359b62aef,

title = "Criteria for different growth modes of thin films",

abstract = "The possibilities to separate different growth modes of thin filsm are discussed using results of Monte Carlo simulation. The growth mode can be recognized from the time evolution of the coverage, the mean square deviation of the coverage, the estimated number of clusters on the substrate and snapshots at different stages of growth. In addition to defining and verifying the criteria for layer-by-layer and island modes, we can identify the intermediate simultaneous multilayer growth.",

author = "Nieminen, {J. A.} and Kimmo Kaski",

year = "1987",

doi = "10.1016/S0039-6028(87)80605-2",

language = "English",

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journal = "Surface Science",

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T1 - Criteria for different growth modes of thin films

AU - Nieminen, J. A.

AU - Kaski, Kimmo

PY - 1987

Y1 - 1987

N2 - The possibilities to separate different growth modes of thin filsm are discussed using results of Monte Carlo simulation. The growth mode can be recognized from the time evolution of the coverage, the mean square deviation of the coverage, the estimated number of clusters on the substrate and snapshots at different stages of growth. In addition to defining and verifying the criteria for layer-by-layer and island modes, we can identify the intermediate simultaneous multilayer growth.

AB - The possibilities to separate different growth modes of thin filsm are discussed using results of Monte Carlo simulation. The growth mode can be recognized from the time evolution of the coverage, the mean square deviation of the coverage, the estimated number of clusters on the substrate and snapshots at different stages of growth. In addition to defining and verifying the criteria for layer-by-layer and island modes, we can identify the intermediate simultaneous multilayer growth.

U2 - 10.1016/S0039-6028(87)80605-2

DO - 10.1016/S0039-6028(87)80605-2

M3 - Article

VL - 185

SP - L489-L496

JO - Surface Science

JF - Surface Science

SN - 0039-6028

IS - 1-2

ER -

Criteria for different growth modes of thin films

Abstract

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