Coupled MEMS resonator networks 

    Research output: ThesisLicenciate's thesis

    Abstract

    Micromechanical resonance frequencies are in a standard manner a few tens of MHz and can even cover the requency range up to a few GHz. When using high quality material such as quartz of silicon, also internal losses are very low. By physical coupling of resonators into a network, one can realize various mechanical signal processing, filtering or for example neural network type behavior. Since coupling between resonators are realized by some kind of bridge, which can be either rather linear or alternatively intentionally very nonlinear, the overall behavior of the whole network is very complex. Of general interest are effects that originate from multiple inputs and outputs and which could lead to a rather unexpected spectral or transient behavior of the signals, which can be found by computer modelling.
    Original languageEnglish
    QualificationLicentiate's degree
    Awarding Institution
    • Aalto University
    Supervisors/Advisors
    • Tittonen, Ilkka, Supervising Professor
    • Koskenvuori, Mika, Thesis Advisor
    Publisher
    Publication statusPublished - 2017
    MoE publication typeG3 Licentiate thesis

    Keywords

    • Micromechanical resonators
    • Network
    • Mechanical signal processing
    • Electrical equivalent circuits
    • Simulations

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