CO2-based atomic/molecular layer deposition of lithium ethylene carbonate thin films

Juho Heiska, Milad Madadi, Maarit Karppinen*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)
69 Downloads (Pure)


When a conventional lithium-ion battery (LIB) is cycled, a solid electrolyte interphase (SEI) forms on the surface of a negative electrode, passivating it but also depleting the capacity of the battery. Most commercial LIBs utilize a carbonate-based electrolyte, which at least temporarily leads to the formation of lithium alkyl carbonates (ROCO2Li) as the main organic SEI component. Here, we pioneer the use of atomic/molecular layer deposition (ALD/MLD) for the fabrication of lithium ethyl glycoxide (LiEG) and lithium ethylene carbonate (LiEGCO) thin films, to mimic the lithium alkyl carbonate component of the SEI. For the in situ growth of LiEGCO, we employ for the first time CO2 as an ALD/MLD precursor. The films are characterized using XRR, GIXRD, FTIR, AFM and SEM.

Original languageEnglish
Pages (from-to)2441-2447
Number of pages7
JournalNanoscale Advances
Issue number6
Publication statusPublished - 1 Jun 2020
MoE publication typeA1 Journal article-refereed


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