Controlling the Crystallinity and Roughness of Atomic Layer Deposited Titanium Dioxide Films

Research output: Contribution to journalArticle


  • Riikka Puurunen

  • Timo Sajavaara
  • Eero Santala
  • Ville Miikkulainen
  • Tapio Saukkonen
  • Mikko Laitinen
  • Markku Leskelä

Research units


Original languageEnglish
Pages (from-to)8101-8107
JournalJournal of Nanoscience and Nanotechnology
Issue number9
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

    Research areas

  • anatase, atomic layer deposition, roughness, TIO2

ID: 956690