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Controlling the Crystallinity and Roughness of Atomic Layer Deposited Titanium Dioxide Films
Riikka L. Puurunen, Timo Sajavaara, Eero Santala, Ville Miikkulainen, Tapio Saukkonen, Mikko Laitinen, Markku Leskelä
Research output: Contribution to journal › Article › Scientific › peer-review
52
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(Scopus)