Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Epitaxy

K. Kukli, M. Peussa, L.-S. Johansson, E. Nykänen, L. Niinistö

    Research output: Contribution to journalArticle

    Original languageEnglish
    Pages (from-to)216-221
    JournalMaterials Science Forum
    Volume315-317
    Publication statusPublished - 1999
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ale
    • atomic layer epitaxy
    • thin film
    • yttrium oxysulfide

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