Controlled growth of Yttrium oxysulfide thin films by Atomic Layer Deposition

K. Kukli, L-S. Johansson, E. Nykänen, M. Peussa, L. Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    10 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)216-221
    JournalMaterials Science Forum
    Issue number315-317
    Publication statusPublished - 1999
    MoE publication typeA1 Journal article-refereed

    Cite this