Controlled growth of tin dioxide thin films by atomic layer epitaxy

H. Viirola, L. Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    57 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)144-149
    JournalThin Solid Films
    Volume249
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALE
    • thin films
    • tin dioxide

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