Controlled growth of tin dioxide thin films by atomic layer epitaxy

H. Turunen, L. Niinistö

    Research output: Working paperProfessional

    57 Citations (Scopus)
    Original languageEnglish
    Place of PublicationRaleigh, USA
    Publication statusPublished - 1992
    MoE publication typeD4 Published development or research report or study

    Publication series

    Name2nd International Symposium on Atomic Layer Epitaxy, Raleigh, USA, 1992


    • atomic layer epitaxy (ALE)
    • thin films
    • tin dioxide

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