Original language | English |
---|---|
Pages (from-to) | 127-135 |
Journal | Thin Solid Films |
Volume | 251 |
Publication status | Published - 1994 |
MoE publication type | A1 Journal article-refereed |
Keywords
- ALE
- antimony-doped
- thin films
- tin dioxide
H. Viirola, L. Niinistö
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 127-135 |
Journal | Thin Solid Films |
Volume | 251 |
Publication status | Published - 1994 |
MoE publication type | A1 Journal article-refereed |