Controlled Electrical Conductivity in SnO_2 Thin Films by Oxygen or Hydrocarbon Assisted Atomic Layer Epitaxy

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • M. Utriainen
  • K. Kovacs
  • J.M. Campbell
  • L. Niinistö
  • F. Reti

Research units

Details

Original languageEnglish
Pages (from-to)189-193
JournalJournal of the Electrochemical Society
Volume146
Publication statusPublished - 1999
MoE publication typeA1 Journal article-refereed

    Research areas

  • ale, atomic layer epitaxy, thin film, tin dioxide

ID: 4957096