Controlled Electrical Conductivity in SnO_2 Thin Films by Oxygen or Hydrocarbon Assisted Atomic Layer Epitaxy

M. Utriainen, K. Kovacs, J.M. Campbell, L. Niinistö, F. Reti

    Research output: Contribution to journalArticleScientificpeer-review

    26 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)189-193
    JournalJournal of the Electrochemical Society
    Volume146
    Publication statusPublished - 1999
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ale
    • atomic layer epitaxy
    • thin film
    • tin dioxide

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