Controlled coating of high surface area silica with titania overlayers by atomic layer deposition

Jetta Keränen, Eero Iiskola, Claude Guimon, Aline Auroux, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)777-785
    JournalStudies in Surface Science and Catalysis
    Volume143
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • atomic layer deposition
    • catalysts
    • silica

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