Control of oxygen non-stoichiometry in MnCo2O4+? thin films grown by ALD

K. Uusi-Esko, E-L. Rautama, Timo Sajavaara, M. Pihlatie, M. Karppinen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication10th International Conference on Atomic Layer Deposition, posteriesitys, Soul, Etelä-Korea, 20.-23.6.2010
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication

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