Original language | English |
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Title of host publication | 10th International Conference on Atomic Layer Deposition, posteriesitys, Soul, Etelä-Korea, 20.-23.6.2010 |
Publication status | Published - 2010 |
MoE publication type | A4 Article in a conference publication |
Control of oxygen non-stoichiometry in MnCo2O4+? thin films grown by ALD
K. Uusi-Esko, E-L. Rautama, Timo Sajavaara, M. Pihlatie, M. Karppinen
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review