Control of oxygen non-stoichiometry in MnCo2O4+? thin films grown by ALD

K. Uusi-Esko, E-L. Rautama, Timo Sajavaara, M. Pihlatie, M. Karppinen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	10th International Conference on Atomic Layer Deposition, posteriesitys, Soul, Etelä-Korea, 20.-23.6.2010
Publication status	Published - 2010
MoE publication type	A4 Article in a conference publication

Cite this

@inproceedings{51ccec333ed04aaeb519f02007fa9726,

title = "Control of oxygen non-stoichiometry in MnCo2O4+? thin films grown by ALD",

author = "K. Uusi-Esko and E-L. Rautama and Timo Sajavaara and M. Pihlatie and M. Karppinen",

year = "2010",

language = "English",

booktitle = "10th International Conference on Atomic Layer Deposition, posteriesitys, Soul, Etel{\"a}-Korea, 20.-23.6.2010",

}

10th International Conference on Atomic Layer Deposition, posteriesitys, Soul, Etelä-Korea, 20.-23.6.2010. 2010.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review