@article{c4973b9bee854b67a7ced8e3b964e348,
title = "Continuous-Wave Laser Annealing of a Si/SiO2 Superlattice: Effect of the Ambient Atmosphere and Exposure Period",
author = "Timur Nikitin and Marianna Kemell and Esa Puukilainen and Markku R{\"a}s{\"a}nen and Mikko Ritala and Sergei Novikov and Leonid Khriachtchev",
year = "2014",
doi = "10.1166/sam.2014.1850",
language = "English",
volume = "6",
pages = "1000--1010",
journal = "Science of Advanced Materials",
issn = "1947-2935",
publisher = "American Scientific Publishers",
number = "5",
}