Contactless Diagnostic Tools and Metallic Contamination in the Semiconductor Industry

Hele Savin, Marko Yli-Koski, Antti Haarahiltunen, Heli Talvitie, Juha Sinkkonen

    Research output: Contribution to journalArticleScientificpeer-review

    7 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)319-330
    JournalECS Transactions
    Volume11
    Issue number3
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

    Keywords

    • carrier lifetime
    • characterization
    • copper
    • iron
    • nickel
    • silicon

    Cite this