Conoscopic interferometry of SAW-wafers

P. Äyräs, J.-P. Laine, J. Fagerholm, A. Friberg, M. Kaivola, E. Siren, E. Tervonen, M.M. Salomaa

Research output: Working paperProfessional

Original languageEnglish
Place of PublicationJyväskylä
Publication statusPublished - 1995
MoE publication typeD4 Published development or research report or study

Publication series

NameXXIX Annual Conference of the Finnish Physical Society, Jyväskylä, Finland, March 16-18,1995
PublisherFinnish Physical Society, University of Jyväskylä


  • conoscope
  • optical interferometry

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