Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study

Research output: Contribution to journalArticle

Researchers

  • M. Kariniemi
  • J. Niinistö
  • M. Vehkamäki
  • M. Kemell
  • M. Ritala
  • M. Leskelä
  • M. Putkonen

Research units

Details

Original languageEnglish
Pages (from-to)01
JournalJOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Volume30
Issue number00
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

ID: 736827