Conformality of remote plasma enhanced ALD processes: an experimental study

M. Kariniemi, J. Niinistö, Matti Putkonen, M. Vehkamäki, M. Kemell, M. Ritala, M. Leskelä

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific

Original language	English
Title of host publication	ALD2011, Cambridge, MA, Usa, June 26-29, 2011
Publication status	Published - 2011
MoE publication type	B3 Non-refereed article in conference proceedings

Cite this

@inproceedings{614bbe757520447aa7b01a393b4883cd,

title = "Conformality of remote plasma enhanced ALD processes: an experimental study",

author = "M. Kariniemi and J. Niinist{\"o} and Matti Putkonen and M. Vehkam{\"a}ki and M. Kemell and M. Ritala and M. Leskel{\"a}",

year = "2011",

language = "English",

booktitle = "ALD2011, Cambridge, MA, Usa, June 26-29, 2011",

}