Conformality of remote plasma enhanced ALD processes: an experimental study

M. Kariniemi, J. Niinistö, Matti Putkonen, M. Vehkamäki, M. Kemell, M. Ritala, M. Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

    Original languageEnglish
    Title of host publicationALD2011, Cambridge, MA, Usa, June 26-29, 2011
    Publication statusPublished - 2011
    MoE publication typeB3 Non-refereed article in conference proceedings

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