Conformality analysis of the archetypical Al2O3 ALD process in 3-rd generation silicon based microscopic lateral high aspect ratio test structures

Research output: Contribution to conferencePosterScientificpeer-review

Original languageEnglish
Publication statusAccepted/In press - 27 Jun 2019
MoE publication typeNot Eligible
EventEuroCVD 22-Baltic ALD 16 Conference - Luxembourg, Luxembourg
Duration: 24 Jun 201928 Jun 2019
https://www.eurocvd-balticald2019.lu/

Conference

ConferenceEuroCVD 22-Baltic ALD 16 Conference
CountryLuxembourg
CityLuxembourg
Period24/06/201928/06/2019
Internet address

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