Conformality analysis of the archetypical Al2O3 ALD process in 3-rd generation silicon based microscopic lateral high aspect ratio test structures

Jihong Yim

Conformality analysis of the archetypical Al2O3 ALD process in 3-rd generation silicon based microscopic lateral high aspect ratio test structures

Research output: Contribution to conference › Poster › Scientific › peer-review

Original language	English
Publication status	Accepted/In press - 27 Jun 2019
MoE publication type	Not Eligible
Event	EuroCVD 22-Baltic ALD 16 Conference - Luxembourg, Luxembourg Duration: 24 Jun 2019 → 28 Jun 2019 https://www.eurocvd-balticald2019.lu/

Conference

Conference	EuroCVD 22-Baltic ALD 16 Conference
Country/Territory	Luxembourg
City	Luxembourg
Period	24/06/2019 → 28/06/2019
Internet address	https://www.eurocvd-balticald2019.lu/

Cite this

@conference{56f5acf450cc492ea78d8667e56b3c34,

title = "Conformality analysis of the archetypical Al2O3 ALD process in 3-rd generation silicon based microscopic lateral high aspect ratio test structures",

author = "Jihong Yim",

year = "2019",

month = jun,

day = "27",

language = "English",

note = "EuroCVD 22-Baltic ALD 16 Conference ; Conference date: 24-06-2019 Through 28-06-2019",

url = "https://www.eurocvd-balticald2019.lu/",

}